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Focused Ion Beam
Focused Ion Beam microscope (Zeiss Neon 40) with cross beam (FIB/SEM) for observation, selective milling and depsotion, tomography, TEM lamella preparation, microfabrication, elemental analysis and cristal orientation determination.
- Galium FIB. 1pA-50nA, 2-30kV, 7nm resolution
- Field emission SEM (Shottky FE) 4pA-20nA, 0.1-30kV, 1.1nm resolution
- BSE, SE, SE in-lens & STEM detectors
- Gas Injection System (Pt, C, SiO2, H2O, F6Xe) for depostion and selective milling
- Micromanipulator in-chamber for TEM lamella extraction
- EDS for elemental detection
- EBSD for crystalographic orientation
