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Contact profilometer
Manufacturer: KLA Tencor
Model: Alpha step IQ

Equipment that can easily identify measurement characteristics using images taken in advance. It can also analyze fine step heights, surface micro-roughness and general errors in thin film coatings. It also identifies vertical range for the detection of large-scale topography from personalized images, and with high reproducibility. Measurement dimensions are up to 10 mm horizontally and up to 400 mm vertically. The resolution of the profilometer is 0.1 nm.


The UPC offers the services performance that the equipment could carry out.

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Scientific and Technical Services at the UPC
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